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13-11-2023 | Original Article

Al-doped ZnO/WO₃ heterostructure films prepared by magnetron sputtering for isopropanol sensors

Authors: Wei-Xiang Gao, Xue-Ting Chang, Xiao-Jie Zhu, Jun-Feng Li, Ying-Chang Jiang, Dong-Sheng Wang, Chuan-Xiao Yang, Shi-Bin Sun

Published in: Rare Metals | Issue 1/2024

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Abstract

Metal oxide semiconductors (MOSs) are ideal sensing materials for detecting volatile organic compounds due to their low cost, diversity, high stability, and ease of production. However, it remains a grand challenge to develop the MOSs-based gas sensors for sensing isopropanol with desired performance via a simple, effective, and controllable method. Herein, we reported the preparation of the Al-doped ZnO (AZO)/WO₃ heterostructure films by directly depositing the AZO coating onto the WO₃ coating using a strategy of magnetron sputtering. The AZO/WO₃ heterostructure films were constructed by numbers of irregular nanoparticles that were interconnected with each other. The AZO/WO₃ heterostructure films-based gas sensors exhibited excellent isopropanol-sensing performance with high response, promising selectivity, low detection limit, fast response rate, wide detection range, and ideal reproducibility. The promising isopropanol-sensing performance of the AZO/WO₃ heterostructure films arises mainly from their high uniformity, unique microstructures with high surface roughness, and the construction of the heterostructure between the AZO and WO₃ coatings. This work provides a versatile approach to prepare the MOSs-based heterostructure films for assembling the gas sensors.

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Title: Al-doped ZnO/WO3 heterostructure films prepared by magnetron sputtering for isopropanol sensors
Authors: Wei-Xiang Gao
Xue-Ting Chang
Xiao-Jie Zhu
Jun-Feng Li
Ying-Chang Jiang
Dong-Sheng Wang
Chuan-Xiao Yang
Shi-Bin Sun
Publication date: 13-11-2023
Publisher: Nonferrous Metals Society of China
Published in: Rare Metals / Issue 1/2024
Print ISSN: 1001-0521
Electronic ISSN: 1867-7185
DOI: https://doi.org/10.1007/s12598-023-02406-w

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