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12-05-2023 | Topical Collection: 19th Conference on Defects (DRIP XIX)

Low-Temperature Growth of ZnMgO Thin Films by Atmospheric Spin-Coating Using Diethylzinc Solution

Authors: Kenji Yoshino, Himeka Tominaga, Yuta Komaki, Masato Imai, Tomohiro Higashi, Takashi Minemoto, Qing Shen, Shuzi Hayase

Published in: Journal of Electronic Materials | Issue 8/2023

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Abstract

Non-doped ZnMgO thin film deposited at room temperature on a white glass using a diethylzinc-based solution grown by atmospheric conventional spin coating was annealed at 150°C. The sample had an average optical transmittance of more than 85% in the visible region, and a-axis orientation hexagonal polycrystal, a dense crystal, and a flat surface. Moreover, the n-type sample was obtained from the predominant zinc interstitial caused by x-ray photoemission spectroscopy. A sample had a resistivity of 14 × 10⁶ Ω cm, carrier concentration of 3.9 × 10¹¹ cm⁻³, and mobility of 5.0 cm² (Vs)⁻¹.

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Title: Low-Temperature Growth of ZnMgO Thin Films by Atmospheric Spin-Coating Using Diethylzinc Solution
Authors: Kenji Yoshino
Himeka Tominaga
Yuta Komaki
Masato Imai
Tomohiro Higashi
Takashi Minemoto
Qing Shen
Shuzi Hayase
Publication date: 12-05-2023
Publisher: Springer US
Published in: Journal of Electronic Materials / Issue 8/2023
Print ISSN: 0361-5235
Electronic ISSN: 1543-186X
DOI: https://doi.org/10.1007/s11664-023-10475-x

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