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Characterization of multilayers by means of EDXS in the analytical TEM

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Abstract

Referring to the characterization of nanoscale multilayers in cross section, the resolution limits of the EDXS method have been investigated. For that purpose EDXS line scan profiles of nanoscale Fe-Cr multilayers have been calculated assuming an increased specimen thickness and different tilts between electron beam and layer interface. The resolution limit seems to be greater than 2 nm layer thickness for regular multilayers. Experimentally a limit of 5 nm was reached.

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Authors and Affiliations

  1. Institut für Festkörper- und Werkstofforschung Dresden, Postfach 270016, D-01171 Dresden, Germany, , , , , , DE

    J. Thomas, Reinhold Rennekamp & Ludwig van Loyen

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  1. J. Thomas
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  2. Reinhold Rennekamp
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  3. Ludwig van Loyen
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Received: 30 July 1997 / Accepted: 2 February 1998

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Thomas, J., Rennekamp, R. & van Loyen, L. Characterization of multilayers by means of EDXS in the analytical TEM. Fresenius J Anal Chem 361, 633–636 (1998). https://doi.org/10.1007/s002160050974

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  • DOI: https://doi.org/10.1007/s002160050974

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