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Erschienen in: e+i Elektrotechnik und Informationstechnik 6/2023

02.10.2023 | Originalarbeit

Tactile sensor solution with MEMS pressure sensors in industrial robotics

verfasst von: Thomas Thurner, Thomas Kammerhofer, Bernhard Reiterer, Michael Hofbaur

Erschienen in: e+i Elektrotechnik und Informationstechnik | Ausgabe 6/2023

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Abstract

Tactile sensing is essential for any haptic interaction of robots and robotic systems with their environments. Throughout this work we introduce a tactile sensing solution based on a MEMS pressure sensor consisting of an array of flexible sensor cells, which enables spatially resolving force and contact pressure measurements over a wide dynamic range at high resolution. A compelling feature of the developed sensor concept is its soft and “human-like” mechanical touch behavior, which can solve challenges regarding the handling of sensitive objects, human-like tactile perception in prosthetics, or human-robot interaction scenarios. The developed sensor solution is characterized and evaluated in a typical collaborative robot work scenario in the industry for the gripping and lifting of objects with a commercial industrial robot system.

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Literatur
1.
Zurück zum Zitat Albert SG, Luber SM, Winkler B (2020) Chapter 47 – Pressure sensors. In: Tilli M, Paulasto-Krockel M, Petzold M, et al (eds) Handbook of Silicon Based MEMS Materials and Technologies (Third Edition). Micro and Nano Technologies, Elsevier, p 915–935 CrossRef Albert SG, Luber SM, Winkler B (2020) Chapter 47 – Pressure sensors. In: Tilli M, Paulasto-Krockel M, Petzold M, et al (eds) Handbook of Silicon Based MEMS Materials and Technologies (Third Edition). Micro and Nano Technologies, Elsevier, p 915–935 CrossRef
2.
Zurück zum Zitat Bayer IS (2022) MEMS-based tactile sensors: materials, processes and applications in robotics. Micromachines 13(12):2051 CrossRef Bayer IS (2022) MEMS-based tactile sensors: materials, processes and applications in robotics. Micromachines 13(12):2051 CrossRef
3.
Zurück zum Zitat Beckerle P, Kõiva R, Kirchner EA, et al (2018) Feel-good robotics: Requirements on touch for embodiment in assistive robotics. Frontiers in Neurorobotics 12:84 CrossRef Beckerle P, Kõiva R, Kirchner EA, et al (2018) Feel-good robotics: Requirements on touch for embodiment in assistive robotics. Frontiers in Neurorobotics 12:84 CrossRef
4.
Zurück zum Zitat Birglen L, Schlicht T (2018) A statistical review of industrial robotic grippers. Robotics and Computer-Integrated Manufacturing 49:88–97 CrossRef Birglen L, Schlicht T (2018) A statistical review of industrial robotic grippers. Robotics and Computer-Integrated Manufacturing 49:88–97 CrossRef
5.
Zurück zum Zitat Chen FY (1982) Gripping mechanisms for industrial robots: an overview. Mechanism and Machine Theory 17(5):299–311 CrossRef Chen FY (1982) Gripping mechanisms for industrial robots: an overview. Mechanism and Machine Theory 17(5):299–311 CrossRef
6.
Zurück zum Zitat Dahiya RS, Metta G, Valle M, et al (2010) Tactile sensing – from humans to humanoids. IEEE Transactions on Robotics 26(1):1–20 CrossRef Dahiya RS, Metta G, Valle M, et al (2010) Tactile sensing – from humans to humanoids. IEEE Transactions on Robotics 26(1):1–20 CrossRef
7.
Zurück zum Zitat De Clercq T, Sianov A, Crevecoeur G (2022) A soft barometric tactile sensor to simultaneously localize contact and estimate normal force with validation to detect slip in a robotic gripper. IEEE Robotics and Automation Letters 7(4):11,767–11,774 CrossRef De Clercq T, Sianov A, Crevecoeur G (2022) A soft barometric tactile sensor to simultaneously localize contact and estimate normal force with validation to detect slip in a robotic gripper. IEEE Robotics and Automation Letters 7(4):11,767–11,774 CrossRef
8.
Zurück zum Zitat Eaton WP, Smith JH (1997) Micromachined pressure sensors: review and recent developments. Smart Materials and Structures 6(5):530 CrossRef Eaton WP, Smith JH (1997) Micromachined pressure sensors: review and recent developments. Smart Materials and Structures 6(5):530 CrossRef
9.
Zurück zum Zitat Fiorillo A, Critello DC, Pullano S (2018) Theory, technology and applications of piezoresistive sensors: a review. Sensors and Actuators A: Physical 281:156–175 CrossRef Fiorillo A, Critello DC, Pullano S (2018) Theory, technology and applications of piezoresistive sensors: a review. Sensors and Actuators A: Physical 281:156–175 CrossRef
10.
Zurück zum Zitat Grover A (2021) Learning to detect slip using barometric tactile sensors. Master’s Thesis, University of Toronto Grover A (2021) Learning to detect slip using barometric tactile sensors. Master’s Thesis, University of Toronto
11.
Zurück zum Zitat Grover A, Nadeau P, Grebe C, et al (2022) Learning to detect slip with barometric tactile sensors and a temporal convolutional neural network. In: 2022 International Conference on Robotics and Automation (ICRA), pp 570–576 CrossRef Grover A, Nadeau P, Grebe C, et al (2022) Learning to detect slip with barometric tactile sensors and a temporal convolutional neural network. In: 2022 International Conference on Robotics and Automation (ICRA), pp 570–576 CrossRef
14.
Zurück zum Zitat Javed Y, Mansoor M, Shah IA (2019) A review of principles of MEMS pressure sensing with its aerospace applications. Sensor Review 39(5):652–664 CrossRef Javed Y, Mansoor M, Shah IA (2019) A review of principles of MEMS pressure sensing with its aerospace applications. Sensor Review 39(5):652–664 CrossRef
15.
Zurück zum Zitat Kim G, Hwang D (2022) BaroTac: Barometric three-axis tactile sensor with slip detection capability. Sensors 23:428 CrossRef Kim G, Hwang D (2022) BaroTac: Barometric three-axis tactile sensor with slip detection capability. Sensors 23:428 CrossRef
16.
Zurück zum Zitat Li Q, Kroemer O, Su Z, et al (2020) A review of tactile information: perception and action through touch. IEEE Transactions on Robotics 36(6):1619–1634CrossRef Li Q, Kroemer O, Su Z, et al (2020) A review of tactile information: perception and action through touch. IEEE Transactions on Robotics 36(6):1619–1634CrossRef
17.
Zurück zum Zitat Nguyen TD, Lee JS (2022) Recent development of flexible tactile sensors and their applications. Sensors 22(1):50 CrossRef Nguyen TD, Lee JS (2022) Recent development of flexible tactile sensors and their applications. Sensors 22(1):50 CrossRef
18.
Zurück zum Zitat Peng Y, Yang N, Xu Q, et al (2021) Recent advances in flexible tactile sensors for intelligent systems. Sensors 21(16):5392 CrossRef Peng Y, Yang N, Xu Q, et al (2021) Recent advances in flexible tactile sensors for intelligent systems. Sensors 21(16):5392 CrossRef
19.
Zurück zum Zitat Singh G, Banga VK (2022) Robots and its types for industrial applications. Materials Today: Proceedings 60:1779–1786 CrossRef Singh G, Banga VK (2022) Robots and its types for industrial applications. Materials Today: Proceedings 60:1779–1786 CrossRef
20.
Zurück zum Zitat Smith CS (1954) Piezoresistance effect in germanium and silicon. Physical Review 94(1):42–49 CrossRef Smith CS (1954) Piezoresistance effect in germanium and silicon. Physical Review 94(1):42–49 CrossRef
21.
Zurück zum Zitat Song P, Ma Z, Ma J, et al (2020) Recent progress of miniature MEMS pressure sensors. Micromachines 11(1):56 (38) CrossRef Song P, Ma Z, Ma J, et al (2020) Recent progress of miniature MEMS pressure sensors. Micromachines 11(1):56 (38) CrossRef
22.
Zurück zum Zitat Tenzer Y, Jentoft LP, Howe RD (2014) The feel of MEMS barometers: inexpensive and easily customized tactile array sensors. IEEE Robotics & Automation Magazine 21(3):89–95 CrossRef Tenzer Y, Jentoft LP, Howe RD (2014) The feel of MEMS barometers: inexpensive and easily customized tactile array sensors. IEEE Robotics & Automation Magazine 21(3):89–95 CrossRef
23.
Zurück zum Zitat Tiwana MI, Redmond SJ, Lovell NH (2012) A review of tactile sensing technologies with applications in biomedical engineering. Sensors and Actuators A: Physical 179:17–31 CrossRef Tiwana MI, Redmond SJ, Lovell NH (2012) A review of tactile sensing technologies with applications in biomedical engineering. Sensors and Actuators A: Physical 179:17–31 CrossRef
Metadaten
Titel
Tactile sensor solution with MEMS pressure sensors in industrial robotics
verfasst von
Thomas Thurner
Thomas Kammerhofer
Bernhard Reiterer
Michael Hofbaur
Publikationsdatum
02.10.2023
Verlag
Springer Vienna
Erschienen in
e+i Elektrotechnik und Informationstechnik / Ausgabe 6/2023
Print ISSN: 0932-383X
Elektronische ISSN: 1613-7620
DOI
https://doi.org/10.1007/s00502-023-01159-9

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